From polishing, the wafers proceed into a series of cleaning systems. The first system consists of sequential immersion tanks designed to remove residual slurry, wax and larger contaminants. This "pre-clean" step is essentially preparing the wafers to enter our world-class clean room environment.
The "final" cleaning stage is yet another series of baths. These more advanced chemical baths are optimized to remove any metallic contamination and remaining particulate. Bath temperatures, chemical mixing and filtration are all carefully controlled by a sophisticated computer system monitoring every parameter of the cleaner. The wafers emerge from final cleaning as the flattest and cleanest wafers in the world.
Before the wafers continue on to either packaging or Epitaxy, they are 100 percent inspected on the latest generation of electronic particle detection tools.